Fig. 1. Damage probabilities of (a) the front surface, and (b) the rear surface for the four series of fused silica.

Fig. 2. Damage probabilities of SiO2 coatings deposited on the substrates of series (a) A and (b) B, which are measured on the input surface.

Fig. 3. (a) The scratch densities and (b) the dig densities of the same fused silica sample etched to different depths.

Fig. 4. Damage morphologies of the front surfaces for (a) damage sites irradiated with 33.5  J/cm2 in series A (b) undamaged sites in series C.

Fig. 5. The Rq of the four series.

Fig. 6. Rq map of (a) series A, (b) series C, and (c) series D.