Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 30, Issue 1, 277(2010)

Optical Properties of Al2O3 Thin Film Fabricated by Atomic Layer Deposition

He Junpeng*, Zhang Yueguang, Shen Weidong, Liu Xu, and Gu Peifu
Author Affiliations
  • [in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (16)
    Cited By (8)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    He Junpeng, Zhang Yueguang, Shen Weidong, Liu Xu, Gu Peifu. Optical Properties of Al2O3 Thin Film Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2010, 30(1): 277

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Nov. 7, 2008

    Accepted: --

    Published Online: Feb. 1, 2010

    The Author Email: Junpeng He (hjpcool@126.com)

    DOI:10.3788/aos20103001.0277

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology