Acta Optica Sinica, Volume. 30, Issue 1, 277(2010)
Optical Properties of Al2O3 Thin Film Fabricated by Atomic Layer Deposition
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He Junpeng, Zhang Yueguang, Shen Weidong, Liu Xu, Gu Peifu. Optical Properties of Al2O3 Thin Film Fabricated by Atomic Layer Deposition[J]. Acta Optica Sinica, 2010, 30(1): 277
Paper Information
Category: Thin Films
Received: Nov. 7, 2008
Accepted: --
Published Online: Feb. 1, 2010
The Author Email: Junpeng He (hjpcool@126.com)
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