Fig. 1. Optical path of reflection gratings measurement based on Tablot imaging principle. (a) Scheme of Talbot imaging; (b) scheme of optical path for reflective grating measurement

Fig. 2. Optical path of plane reflection grating measuring system

Fig. 3. Interpolation error induced by the signal waveform error. (a) Single error; (b) multiple error synthesis

Fig. 4. Flow chart of real time correction of grating signal error

Fig. 5. Basic principle of the grating signal correction

Fig. 6. Hardware configuration for the grating dynamic measurement system

Fig. 7. Establishment of experimental platform for grating dynamic measurement system

Fig. 8. Interpolation error curve within a period

Fig. 9. Long-stroke measurement error curve. (a) In x direction; (b) in y direction

Fig. 10. Grating dynamic measurement curve under uniform motion. (a) Velocity curve; (b) acceleration curve

Fig. 11. Grating dynamic measurement curve under reciprocating motion. (a) Velocity curve; (b) acceleration curve