Research on Reflective Two-Dimensional Grating Measurement System

Hongzhong Liu; Yongsheng Shi; Lei Yin; Bangdao Chen; Biao Lei; Weitao Jiang; Dong Niu; Lanlan Wang; Wei Jiang; Guojun Li; Jinju Chen

doi:10.3788/LOP222844

Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312018(2023)

Research on Reflective Two-Dimensional Grating Measurement System

Hongzhong Liu^1,2、*, Yongsheng Shi^1,2, Lei Yin^1,2, Bangdao Chen^1,2, Biao Lei^1,2, Weitao Jiang^1,2, Dong Niu^1,2, Lanlan Wang^1,2, Wei Jiang^1,2, Guojun Li^1,2, and Jinju Chen³

Author Affiliations

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an 710049, Shaanxi, China

²School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China

³School of Engineering, Newcastle University, Newcastle NE1 7RU, UK

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Hongzhong Liu, Yongsheng Shi, Lei Yin, Bangdao Chen, Biao Lei, Weitao Jiang, Dong Niu, Lanlan Wang, Wei Jiang, Guojun Li, Jinju Chen. Research on Reflective Two-Dimensional Grating Measurement System[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312018

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Oct. 20, 2022

Accepted: Dec. 5, 2022

Published Online: Feb. 14, 2023

The Author Email: Hongzhong Liu (hzliu@mail.xjtu.edu.cn)

DOI:10.3788/LOP222844

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology