Chinese Journal of Lasers, Volume. 36, Issue 5, 1195(2009)
Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films
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Xiao Qiling, Shao Shuying, Shao Jianda, Fan Zhengxiu. Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films[J]. Chinese Journal of Lasers, 2009, 36(5): 1195
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