[1] [1] BahlawaneN. andLenobleD.,Vanadium oxide compounds: Structure, properties, and growth from the gas phase,Chem. Vap. Depos.20,299(2014).

[2] [2] MorinF. J.,Oxides which show a metal-to-insulator transition at the Neel temperature,Phys. Rev. Lett.3,34(1959).

[3] [3] PartlowD. P.,GurkovichS. R.,RadfordK. C. andDenesL. J.,Switchable vanadium-oxide films by a sol–gel process,J. Appl. Phys.70,443(1991).

[4] [4] KeY.,WangS.,LiuG.,LiM.,WhiteT. J. andLongY.,Vanadium Dioxide: The multistimuli responsive material and its applications,Small14,39(2018).

[5] [5] JagerM. F.,OttC.,KrausP. M.,KaplanC. J.,PouseW.,MarvelR. E.,HaglundR. F.,NeumarkD. M. andLeoneS. R.,Tracking the insulator-to-metal phase transition in VO2 with few-femtosecond extreme UV transient absorption spectroscopy,Proc. Natl. Acad. Sci. USA114,36(2017).

[6] [6] BorekM.,QianF.,NagabushnamV. andSinghR. K.,Pulsed laser deposition of oriented VO2 thin films on R-cut sapphire substrates,Appl. Phys. Lett.63,24(1993).

[7] [7] KimD. H. andKwokH. S.,Pulsed laser deposition of VO2 thin films,Appl. Phys. Lett.65,3188(1994).

[8] [8] AlievV. S.,BortnikovS. G. andBadmaevaI. A.,Anomalous large electrical capacitance of planar microstructures with vanadium dioxide films near the insulator-metal phase transition,Appl. Phys. Lett.104,13(2014).

[9] [9] KarapetyanG. Y.,KaydashevV. E.,ZhilinD. A.,MinasyanT. A.,AbdulvakhidovK. G. andKaidashevE. M.,Use of multiple acoustic reflections to enhance SAW UV photo-detector sensitivity,Smart Mater. Struct.26,035029(2017).

[10] [10] KarapetyanG. Ya.,KaydashevV. E.,ZhilinD. A.,KutepovM. E.,MinasyanT. A. andKaidashevE. M.,A surface acoustic wave impedance-loaded high sensitivity sensor with wide dynamic range for ultraviolet light detection,Sens. Actuat. A296,70(2019).

[11] [11] LafortA.et al.,Optical properties of thermochromic VO2 thin films on stainless steel: Experimental and theoretical studies,Thin Solid Films519,3283(2011).

[12] [12] KanaJ. B. K.et al.,Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering,Appl. Surf. Sci.254,3959(2008).

[13] [13] DriscollT.,KimH. T.,ChaeB. G.,Di VentraM. andBasovD. N.,Phase-transition driven memristive system,Appl. Phys. Lett.95,043503(2009).

[14] [14] MathurS.,RuegamerT. andGrobelsekI.,Phase-selective CVD of vanadium oxide nanostructures,Chem. Vap. Depos.13,42(2007).

[15] [15] SahanaM. B.,DharmaprakashM. S. andShivashankarS. A.,Microstructure and properties of VO2 thin films deposited by MOCVD from vanadyl acetylacetonate,J. Mater. Chem.12,333(2002).

[16] [16] DillemansL.,LietenR. R.,MenghiniM.,SmetsT.,SeoJ. W. andLocquetJ. P.,Correlation between strain and the metal–insulator transition in epitaxial V2O3 thin films grown by molecular beam epitaxy,Thin Solid Films520,4730(2012).

[17] [17] RataA. D.,ChezanA. R.,HaverkortM. W.,HsiehH. H.,LinH. J.,ChenC. T.,TjengL. H. andHibmaT.,Growth and properties of strained VOx thin films with controlled stoichiometry,Phys. Rev. B69,075404(2004).

[18] [18] FanS.,FanL.,LiQ.,LiuJ. andYeB.,The identification of defect structures for oxygen pressure dependent VO2 crystal films,Appl. Surf. Sci.321,464(2014).

[19] [19] KimB. J.,LeeY. W.,ChoiS.,ChaeB. G. andKimH. T.,Analysis of the surface morphology and the resistance of VO2 thin films on M-plane Al2O3,J. Korean Phys. Soc.50,653(2007).

[20] [20] KutepovM. E.,KaydashevV. E.,KarapetyanG. Y.,MinasyanT. A.,Chernyshev1A. V.,AbdulvakhidovK. G.,ShevtsovaS. I.,GlazunovaE. V.,IrkhaV. A. andKaidashevE. M.,Deep UV light sensitive Zn1–x–yMgxAlyO films with fast photoelectric response for SAW photodetectors,Smart Mater. Struct.28,065024(2019).

[21] [21] HemphillR. R.,Effect of a thin-film phase-transition material on surface acoustic wave propagation,IEEE Ultrason. Symp.(Dallas, TX, USA,1984),pp. 1006–1010.