Optimizing VO<sub>2</sub> film properties for use in SAW devices

M. E. Kutepov; G. Ya. Karapetyan; I. V. Lisnevskaya; K. G. Abdulvakhidov; A. A. Kozmin; E. M. Kaidashev

doi:10.1142/S2010135X21600122

Journal of Advanced Dielectrics, Volume. 11, Issue 5, 2160012(2021)

Optimizing VO₂ film properties for use in SAW devices

M. E. Kutepov^1、*, G. Ya. Karapetyan¹, I. V. Lisnevskaya², K. G. Abdulvakhidov³, A. A. Kozmin¹, and E. M. Kaidashev¹

Author Affiliations

¹Laboratory of Nanomaterials, Southern Federal University, Stachki, 200/1, 344090 Rostov-on-Don, Russia

²Department of Chemistry, Southern Federal University, Zorge, 7, 344090, Rostov-on-Don, Russia

³Smart Materials Research Institute, Southern Federal University, Sladkova, 178/24, 344090, Rostov-on-Don, Russia

show less

Figures & Tables(0)

Tools

Get Citation

Copy Citation Text

M. E. Kutepov, G. Ya. Karapetyan, I. V. Lisnevskaya, K. G. Abdulvakhidov, A. A. Kozmin, E. M. Kaidashev. Optimizing VO₂ film properties for use in SAW devices[J]. Journal of Advanced Dielectrics, 2021, 11(5): 2160012

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Research Articles

Received: Apr. 15, 2021

Accepted: Jun. 8, 2021

Published Online: Feb. 21, 2022

The Author Email: Kutepov M. E. (kutepov.max@yandex.ru)

DOI:10.1142/S2010135X21600122

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology