Researching | Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure

Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1723001(2024)

Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure

Fan Xu^1,2, Changsi Peng¹, Zhongming Zeng², and Dongmin Wu^2、*

Author Affiliations

¹School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, Jiangsu, China

²Nano-Fabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu, China

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References (17)

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References(17)

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[3] Xu F H, Qiao D Y, Song X M et al. A semi-coaxial MEMS-based LiDAR[C], 6726-6731(2019).

[4] Zhong Y H, Gong Q, Zhu T F. High speed optical scanning system based on MEMS[J]. Applied Laser, 41, 391-394(2021).

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[6] Fang L, Cai J, Ye J L et al. Modeling of DMD diffraction effect and its application in laser direct writing equipment[J]. Laser & Optoelectronics Progress, 61, 1522002(2024).

[7] Yu G Q, Lü B Y, Xu Y et al. Exposure time optimization of laser interference direct writing device based on MEMS micromirror[J]. Laser & Optoelectronics Progress, 61, 1114002(2024).

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[9] Xie X W, Hu J, Shen Y B. Phase imaging based on random coding modulation of digital micro-mirror device[J]. Acta Optica Sinica, 40, 2311001(2020).

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[14] Zhou L, Zhang X Y, Xie H K. An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability[J]. Micromachines, 10, 323(2019).

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[16] He J H, Zhou P, Yu H J et al. Research on large size MEMS scanning mirror driven by electromagnetic[J]. Acta Photonica Sinica, 46, 0123003(2017).

[17] DuL Y. Research on MEMS scanning mirror applied in lidar[D](2021).

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Fan Xu, Changsi Peng, Zhongming Zeng, Dongmin Wu. Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1723001

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Paper Information

Category: Optical Devices

Received: Nov. 28, 2023

Accepted: Jan. 22, 2024

Published Online: Sep. 11, 2024

The Author Email: Dongmin Wu (dmwu2008@sinano.ac.cn)

DOI:10.3788/LOP232569

CSTR:32186.14.LOP232569

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology