Fig. 1. Schematic diagram of micro mirror package structure

Fig. 2. Schematic diagram of the structural division of beam

Fig. 3. Structure of two-dimensional MEMS micromirror and local schematic diagram. (a) Monolithic structure; (b) local structure

Fig. 4. Simulation analysis of MEMS micromirrors. (a) Fast axial stress distribution; (b) slow axial stress distribution; (c) stress distribution of fast axis of straight beam; (d) stress distribution of slow axis of straight beam

Fig. 5. Specular deformation analysis

Fig. 6. Manufacturing process of MEMS micromirrors. (a) Homogenization photolithography to form a mirror pattern; (b) electron beam evaporation mirror reflector; (c) lift off; (d) homogenized photolithography as an etching mask; (e) deep silicon etching out the structure

Fig. 7. Micromirror package structure. (a) Coil holes and embedded grooves; (b) complete assembly

Fig. 8. Schematic diagram of micromirror testing. (a) Test light path diagram; (b) two-dimensional scanning pattern

Fig. 9. Voltage corner response. (a) Slow axis response; (b) fast axis response

Fig. 10. Fast axis frequency response. (a) Simulation value; (b) experimental value

Fig. 11. Angle stability test