Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1723001(2024)

Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure

Fan Xu1,2, Changsi Peng1, Zhongming Zeng2, and Dongmin Wu2、*
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, Jiangsu, China
  • 2Nano-Fabrication Facility, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu, China
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    To improve the reliability of micro-electro-mechanical system (MEMS) micromirrors during their operation, an electromagnetically driven MEMS micromirror with a mirror measuring 5 mm×6 mm and a new torsion beam structure is designed. A finite-element simulation algorithm is used to simulate the MEMS micromirror, improve the design rationality of its motion mode, and complete the process preparation and encapsulation of the designed structure. The prepared two-dimensional MEMS micromirror offers the advantages of simple process, low manufacturing cost, and high corner stability. Test results show that the MEMS micromirror equipped with the new torsion beam can achieve biaxial rotation, with a fast-axis resonant frequency of 1082.2 Hz and an optical angle of 53.9°, as well as a slow-axis operating frequency of 60.0 Hz and an optical angle of 20.8°. The results of stability test indicate that its mechanical half-angle error is 0.21° and its overall angle fluctuation is less than 2.6%. This two-dimensional MEMS micromirror has a large angle and exhibits high stability, thus satisfying the demands of MEMS lidar.

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    Fan Xu, Changsi Peng, Zhongming Zeng, Dongmin Wu. Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1723001

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    Paper Information

    Category: Optical Devices

    Received: Nov. 28, 2023

    Accepted: Jan. 22, 2024

    Published Online: Sep. 11, 2024

    The Author Email: Dongmin Wu (dmwu2008@sinano.ac.cn)

    DOI:10.3788/LOP232569

    CSTR:32186.14.LOP232569

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