Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312016(2023)
Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements
References(39)
[1] Li Z K, Zhang Z H, Lu Y F et al. Progress of joule balance and redifination of kilogram[J]. Acta Physica Sinica, 67, 160601(2018).
[2] Huang Q H. International technology roadmap for semiconductors(2013 edition)[J]. China Integrated Circuit, 23, 25-45(2014).
[3] Abbott B P, Abbott R, Abbott T D et al. GW151226: observation of gravitational waves from a 22-solar-mass binary black hole coalescence[J]. Physical Review Letters, 116, 241103(2016).
[4] Bai Y, Hu P C, Lu Y F et al. A six-axis heterodyne interferometer system for the joule balance[J]. IEEE Transactions on Instrumentation and Measurement, 66, 1579-1585(2017).
[5] Li Z K, Bai Y, Xu J X et al. The upgrade of NIM-2 joule balance since 2017[J]. Metrologia, 57, 055007(2020).
[7] Fan C L, Li D Y. A national governance mechanism for the development of emerging science and technology: an analysis of the 20-year development of the U.S. national nanotechnology initiative (NNI)[J]. China Soft Science, 55-68(2020).
[9] Pisani M, Yacoot A, Balling P et al. Comparison of the performance of the next generation of optical interferometers[J]. Metrologia, 49, 455-467(2012).
[19] Hu P C, Tan J B, Yang H X et al. A new lock point offset correction-based frequency stabilization method for longitudinal Zeeman laser[J]. Journal of Optoelectronics·Laser, 19, 46-49, 53(2008).
[20] Yin Z Q. Research on separated-type dual-frequency stabilized laser based on integrated water-cooling method for reducing noises[D](2018).
[21] Murakami F, Tukuda M, Shoji Y et al. Frequency stabilization of 633-nm He-Ne laser by using frequency modulation spectroscopy of 127I2 enhanced by an external optical cavity[J]. Electronics and Communications in Japan, 83, 1-9(2000).
[22] Yang H X, Yang R T, Hu P C et al. Ultrastable offset-locked frequency-stabilized heterodyne laser source with water cooling[J]. Applied Optics, 56, 9179-9185(2017).
[23] Heydemann P L. Determination and correction of quadrature fringe measurement errors in interferometers[J]. Applied Optics, 20, 3382-3384(1981).
[24] Köning R, Wimmer G, Witkovský V. Ellipse fitting by nonlinear constraints to demodulate quadrature homodyne interferometer signals and to determine the statistical uncertainty of the interferometric phase[J]. Measurement Science and Technology, 25, 115001(2014).
[25] Fu H J, Hu P C, Tan J B et al. Simple method for reducing the first-order optical nonlinearity in a heterodyne laser interferometer[J]. Applied Optics, 54, 6321-6326(2015).
[26] Eom T, Choi T, Lee K et al. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Measurement Science and Technology, 13, 222-225(2002).
[27] Diao X F. Study on high speed heterodyne interferometer with spatially separated beams[D](2014).
[28] Fu H J, Wang Y, Hu P C et al. Nonlinear errors resulting from ghost reflection and its coupling with optical mixing in heterodyne laser interferometers[J]. Sensors, 18, 758(2018).
[29] Zuo D T, Ma C, Zhao Y R et al. Research progress of near infrared antireflection films[J]. Metallurgy and Materials, 39, 38-39(2019).
[31] Weichert C, Köchert P, Köning R et al. A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm[J]. Measurement Science and Technology, 23, 094005(2012).
[32] Wang Y. Periodic nonlinear error suppression and measurement of heterodyne laser interferometer with separated beams[D](2021).
[34] Yan L P, Chen B Y, Chen Z Q et al. Phase-modulated dual-homodyne interferometer without periodic nonlinearity[J]. Measurement Science and Technology, 28, 115006(2017).
[35] Yan L. Fast ultra-precision dual-frequency laser interference signal processing technology based on whole period subdivision[D](2008).
[36] Köchert P, Flügge J, Weichert C et al. Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime[J]. Measurement Science and Technology, 23, 074005(2012).
[37] Cai H J. Research on picometer resolution phase subdivision for heterodyne laser interference signals[D](2015).
[40] Wang L J. Integrated technology of photoelectric detection and signal processing in picometer resolution heterodyne interferometer[D](2017).
[41] Zhang Z Y, Zhang W T, Du H et al. Phase subdivision scheme based on instantaneous frequency optimization of wavelet transform[J]. Instrument Technique and Sensor, 108-111(2020).
[42] Strube S, Molnar G, Danzebrink H U. Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range[J]. Measurement Science and Technology, 22, 094026(2011).
[43] Jang Y S, Kim S W. Compensation of the refractive index of air in laser interferometer for distance measurement: a review[J]. International Journal of Precision Engineering and Manufacturing, 18, 1881-1890(2017).
[44] Schödel R, Walkov A, Abou-Zeid A. High-accuracy determination of water vapor refractivity by length interferometry[J]. Optics Letters, 31, 1979-1981(2006).
[45] Meiners-Hagen K, Meyer T, Prellinger G et al. Overcoming the refractivity limit in manufacturing environment[J]. Optics Express, 24, 24092-24104(2016).
[46] Bönsch G, Potulski E. Measurement of the refractive index of air and comparison with modified Edln’s formulae[J]. Metrologia, 35, 133-139(1998).
[47] Huang R Q. Research on high precision measurement technology of temperature sensitive platinum resistance in changing temperature environment of satellite[D](2019).
[48] Edlén B. The refractive index of air[J]. Metrologia, 2, 71-80(1966).
[49] Mao S. Key technologies study of dynamic displacement calibration for high speed heterodyne laser interferometer based on the same measurement trajectory[D](2017).
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Xionglei Lin, Xiaobo Su, Jianing Wang, Yunke Sun, Pengcheng Hu. Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312016
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jan. 3, 2023
Accepted: Jan. 17, 2023
Published Online: Feb. 28, 2023
The Author Email: Hu Pengcheng (hupc@hit.edu.cn)
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