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Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312016(2023)

Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements

Xionglei Lin1...2, Xiaobo Su1,2, Jianing Wang1,2, Yunke Sun1,2, and Pengcheng Hu12,* |Show fewer author(s)
Author Affiliations
  • 1Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, Heilongjiang, China
  • 2Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin 150080, Heilongjiang, China
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    Xionglei Lin, Xiaobo Su, Jianing Wang, Yunke Sun, Pengcheng Hu. Laser Interferometer Technology and Instruments for Sub-Nanometer and Picometer Displacement Measurements[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312016

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 3, 2023

    Accepted: Jan. 17, 2023

    Published Online: Feb. 28, 2023

    The Author Email: Pengcheng Hu (hupc@hit.edu.cn)

    DOI:10.3788/LOP230440

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology