Acta Optica Sinica, Volume. 35, Issue 3, 322007(2015)

Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing

Bai Yang1,2、*, Zhang Feng1, Li Longxiang1,2, Zheng Ligong1, and Zhang Xuejun1
Author Affiliations
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    [1] Li Wenmei, Jiang Chen, Xu Jipeng, Wang Chunhua. Research for Magnetic Compound Fluid Slurry of Optical Glass[J]. Laser & Optoelectronics Progress, 2016, 53(6): 62202

    [2] Lü Liang, Ma Ping, Zhu Heng, Huang Jinyong, Wang Gang. Effect of Material Removal Function on Surface Shape Error Correction in Fluid Jet Polishing[J]. Chinese Journal of Lasers, 2016, 43(4): 416003

    [3] ZHANG Long, YE Lu, ZHANG Jin-ping, ZHENG Lie-hua. Gravity and Support Error Separation of 1.2 m Lightweight Space Mirror[J]. Acta Photonica Sinica, 2018, 47(7): 722002

    [4] JI Shi-ming, GE Jiang-qin, TAN Da-peng, ZENG Xi. Three-phase abrasive flow polishing and distribution characteristics of bubble collapse[J]. Optics and Precision Engineering, 2018, 26(2): 388

    [5] LI Xiao-yuan, YE Min-heng, LIU Jia-bao, TIAN Dong, ZHANG Yun-fei, DONG Hui, WANG Chao. Influence of pH value on removal effect of fused silica during magnetorheological finishing[J]. Optics and Precision Engineering, 2019, 27(12): 2602

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    Bai Yang, Zhang Feng, Li Longxiang, Zheng Ligong, Zhang Xuejun. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Acta Optica Sinica, 2015, 35(3): 322007

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 15, 2014

    Accepted: --

    Published Online: Feb. 4, 2015

    The Author Email: Yang Bai (baiyang5406@sina.com)

    DOI:10.3788/aos201535.0322007

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