Acta Optica Sinica, Volume. 35, Issue 3, 322007(2015)
Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing
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Bai Yang, Zhang Feng, Li Longxiang, Zheng Ligong, Zhang Xuejun. Manufacture of Silicon Modification Layer on Silicon Carbide Surface by Magnetorheological Finishing[J]. Acta Optica Sinica, 2015, 35(3): 322007
Category: Optical Design and Fabrication
Received: Sep. 15, 2014
Accepted: --
Published Online: Feb. 4, 2015
The Author Email: Yang Bai (baiyang5406@sina.com)