Optics and Precision Engineering, Volume. 33, Issue 7, 1065(2025)

Review of MEMS vibration-mirror-based 3D reconstruction of structured light

Min HAN1, Chenping ZHANG2, Zonghua ZHANG2、*, and Xinghui LI1、*
Author Affiliations
  • 1Shenzhen International Graduate School, Tsinghua University, Shenzhen58055, China
  • 2School of Mechanical Engineering, Hebei University of Technology, Tianjin300401, China
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    Figures & Tables(21)
    Typical structured light systems
    Performance radar chart of typical structured light systems
    Sinusoidal fringe projection based on binary defocus
    Fringe projection strategy based on uniaxial MEMS vibration mirror
    Signal control of fringe projection based on biaxial vibration mirror[55]
    Principle of fringe projection based on a biaxial MEMS vibration mirror[55]
    High-resolution fringe projection based on delay superimposition[22]
    System modeling based on motion characteristics of vibrating mirror
    Isophase plane model[3]
    Phase-angle model[25]
    Phase error caused by random light intensity noise[2]
    Window smoothing effect of line laser with non-ideal line width
    Effect of illumination fluctuation on phase reconstruction[1]
    Principle of internal-external layered phase shift method
    Sensitivity of internal phase-shifting to harmonics
    Experimental effect of nested phase shift method
    Errors caused by motion[141]
    Correction of motion introduction errors[140]
    Typical application scenario of structured light 3D reconstruction
    • Table 1. Performance comparison of typical structured light systems

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      Table 1. Performance comparison of typical structured light systems

      Structured light systemAccuracy/mmSpeed/(frame·s-1)Depth of fieldResolutionProgrammablePower consumption/WCostOptical efficiency
      Interference10-1/LargeHigh×~100 W>$10 000Medium
      Physical grating10-3~100SmallHigh×~300 W>$10 000Low
      LCD10-2~50Small~1 K~40 W~$1 500Medium
      DLP10-3~120Small912×1 140(~1 K)~50 W~$2 000Low
      MEMS10-3>1 000Large>4 K~5 W~$500High
    • Table 2. Structured light products

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      Table 2. Structured light products

      BrandProductVersionParameterAppearance
      ChipsensingProjection Module(MEMS)ZX-L090A-B

      FOV:42°×40°

      Gray scale:256

      Work distance:<2.5 m

      ZhiSensor3D Camera(MEMS)D33OXS

      Accuracy:~0.36 mm

      Work distance:~500 mm

      Frame rate:~1 Hz

      Utech3D Camera(MEMS)UFGNRTC1IR00

      Accuracy:~0.35 mm

      Work distance:~400 mm

      Frame rate:<1 Hz

      V-Sensor3D Camera(MEMS)PSN3000

      Accuracy:~1.4 mm

      Work distance:~2100 mm

      Frame rate:<110 frame/s

      RcalSense3D CameraSLM 3DRBP-0231C

      Resolution:1920×1080

      Work distance:<1500 mm

      SOLOMON3D CameraSLM 3DRBP-0231C

      Spatial resolution:~1.4 mm

      Work distance:~1200 mm

      Frame rate:<4 frame/s

      MECHMIND4D CameraMech-Eye Pro S

      Resolution:1920×1200

      Work distance:~1000 mm

      Accuracy:0.1 mm

      Frame rate:~2 frame/s

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    Min HAN, Chenping ZHANG, Zonghua ZHANG, Xinghui LI. Review of MEMS vibration-mirror-based 3D reconstruction of structured light[J]. Optics and Precision Engineering, 2025, 33(7): 1065

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    Paper Information

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    Received: Dec. 16, 2024

    Accepted: --

    Published Online: Jun. 23, 2025

    The Author Email: Zonghua ZHANG (zhzhang@hebut.edu.cn)

    DOI:10.37188/OPE.20253307.1065

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