Fig. 1. Morphology of ablated SiC ceramics at 3.1  J/cm2, 50 pulses: (a) the optical morphology; (b) the 3D profile.

Fig. 2. (a) Morphology of the matrix and (b) the ablation zone at 3.1  J/cm2, 50 pulses.

Fig. 3. (a) Morphology and (b) composition of the ablated SiC ceramics at 3.1  J/cm2, 50 pulses.

Fig. 4. Phases of the SiC zones at 3.1  J/cm2, 50 pulses.

Fig. 5. Morphology of the SiC with laser fluence of (a) 1.5  J/cm2 and (b) 4  J/cm2, 10 pulses.

Fig. 6. (a) Ablation depth and (b) oxidation length.

Fig. 7. Ablation efficiency and ablation depth.