High‑Uniformity Ultra‑Fast Laser Beam Splitting and Precision Machining Based on Hybrid Algorithm

Lei Yang; Xinyu Xu; Jianlei Wang; Yunxia Ye; Xudong Ren; Weibiao Chen

doi:10.3788/CJL221543

Chinese Journal of Lasers, Volume. 50, Issue 16, 1602401(2023)

High‑Uniformity Ultra‑Fast Laser Beam Splitting and Precision Machining Based on Hybrid Algorithm

Lei Yang¹, Xinyu Xu¹, Jianlei Wang³, Yunxia Ye^1,2、*, Xudong Ren¹, and Weibiao Chen³

Author Affiliations

¹School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, Jiangsu, China

²Institute of Micro-nano Optoelectronics and Terahertz Technology,Jiangsu University, Zhenjiang 212013, Jiangsu, China

³Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai 201800, China

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Lei Yang, Xinyu Xu, Jianlei Wang, Yunxia Ye, Xudong Ren, Weibiao Chen. High‑Uniformity Ultra‑Fast Laser Beam Splitting and Precision Machining Based on Hybrid Algorithm[J]. Chinese Journal of Lasers, 2023, 50(16): 1602401

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Dec. 19, 2022

Accepted: Mar. 7, 2023

Published Online: Jul. 18, 2023

The Author Email: Ye Yunxia (yeyunxia@ujs.edu.cn)

DOI:10.3788/CJL221543

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology