[1] LIN Jiachun, TENG Chen, LI Hanxiao et al. Measurement of profile shape deviation of cylindrical gear based on roughness profiler[J]. Journal of Instrumentation and Meter, 41, 15-22(2020).

[2] ZHOU Liang, WANG Zhenhuan, SUN Dongchen et al. The current situation and development of modern precision measurement technology[J]. Journal of Instrumentation, 38, 1869-1878(2017).

[3] ZHU Rihong, SUN Yue, SHEN Huanan et al. Progress and prospect of optical freeform surface detection methods[J]. Journal of Optics, 41, 161-178(2021).

[4] LU E H, ZHANG R T, LIU J et al. Observation of ground surface roughness values obtained by stylus profilometer and white light interferometer for common metal materials[J]. Surface and Interface Analysis, 54, 587-599(2022).

[5] GHODRATI S, KANDI S G, MOHSENI M. Nondestructive, fast, and cost-effective image processing method for roughness measurement of randomly rough metallic surfaces[J]. Journal of the Optical Society of America A, 35, 998-1013(2018).

[6] MA X, WANG J, WANG B et al. Research on optical metrology for complex optical surfaces with focal plane wavefront sensing[J]. Micromachines, 14, 1142(2023).

[7] FU Xiangyu, WANG Daodang, WU Zhendong et al. Compact transient interferometry system for on-line measurement[J]. Journal of Instrumentation, 41, 78-84(2020).

[8] ZHAO M, ZHAO W, YANG K et al. Shack-Hartmann wavefront sensing based on four-quadrant binary phase modulation[J]. Photonics, 9, 575(2022).

[9] TIAN Ailing, ZHANG Hong, LI Huiling et al. Application of reconstructed Zernike polynomial in microlens measurement[J]. Journal of Xi'an Technological University, 31, 120-124(2011).

[10] WANG Jing, WANG Xiaokun, HU Haixiang et al. Shak-Hartmann scanning splicing detection of flat mirror[J]. Infrared and Laser Engineering, 50, 67-73(2021).

[11] DAI Xunyi. Research on large telescope image quality detection technology based on scanning Hartman[D](2020).

[12] YU L, LI D, RUAN Y et al. Wavefront aberration measurement deflectometry for imaging lens tests[J]. Applied Sciences-Basel, 12, 7857(2022).

[13] YANG X, XIE J, LIU R et al. Centroid extraction of laser spots captured by infrared detectors combining laser footprint images and detector observation data[J]. Remote Sensing, 15, 2129(2023).

[14] GU D, LIU X. Shack-Hartmann wavefront sensor based on Kalman filter[J]. Optical Engineering, 61, 093106(2022).

[15] ZHAO M, ZHAO W, WANG S et al. Centroid-predicted deep neural network in Shack-Hartmann sensors[J]. IEEE Photonics Journal, 14, 1-10(2022).

[16] CHENG X, YAN L, LIU L et al. Fabrication-error analysis of injection-molded aspheric elements using typical aberration terms in transmitted wavefront with Shack-Hartmann wavefront-sensing measurement[J]. Optical Engineering, 59, 123102(2020).

[17] WEI Ping, LI Xinyang, LUO Xi et al. Design and verification of Shake-Hartman wavefront sensor digital simulation platform[J]. Chinese Journal of Lasers, 48, 141-150(2021).