Journal of Applied Optics, Volume. 46, Issue 2, 380(2025)
Method of detecting microlens wavefront by Hartmann sensor
Figures & Tables(12)
Table 1. Reconstruction errors of different orders of Zernike polynomial
View tableView in ArticleTable 1. Reconstruction errors of different orders of Zernike polynomial
多项式阶次 12 15 18 21 28 36 RMS/λ 0.062 0 0.051 0.050 3 0.048 0 0.049 2 0.047 0 PV/λ 0.097 8 0.082 0.083 0 0.0814 0.079 6 0.076 5
Table 2. Influence of sampling numbers on fitting errors
View tableView in ArticleTable 2. Influence of sampling numbers on fitting errors
采样点数 170 276 431 585 679 RMS/λ 0.081 0.062 0 0.051 3 0.047 0 0.046 8 PV/λ 0.102 0.096 8 0.083 3 0.076 5 0.076 6
Table 3. Zernike coefficients of lens under test
View tableView in ArticleTable 3. Zernike coefficients of lens under test
Zernike系数 Z1 Z2 Z3 Z4 Z5 Z6 Z7 Z8 Z9 计算结果 −0.006 −0.108 9 −0.070 6 0.010 9 0.062 2 0.008 2 0.015 4 0.013 4 −0.001 Zernike系数 Z10 Z11 Z12 Z13 Z14 Z15 Z16 Z17 Z18 计算结果 −0.009 4 −0.002 1 −0.002 2 −0.010 6 0.005 −0.002 5 −0.001 8 0.001 8 0.002 Zernike系数 Z19 Z20 Z21 Z22 Z23 Z24 Z25 Z26 Z27 计算结果 0.000 2 −0.002 8 −0.000 2 0.000 6 0.007 0.009 0.001 5 −0.001 0.001 3 Zernike系数 Z28 Z29 Z30 Z31 Z32 Z33 Z34 Z35 Z36 计算结果 0.000 4 −0.001 0.001 6 −0.000 2 0.000 3 0.000 5 0.000 7 0.000 2 −0.001 7
Table 4. List of aberrations of microlenses to be tested
View tableView in ArticleTable 4. List of aberrations of microlenses to be tested
像差 离焦 0°像散 45°像散 X方向彗 差和倾斜 大小/μm 0.010 9 0.062 2 0.008 2 0.015 4 像差 Y方向彗 差和倾斜 球差和离焦 0°三叶像散 大小/μm 0.013 4 −0.001 −0.009 4
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Weibin YANG, Chunyan WANG, Weiguo ZHANG, Jinyu WANG, Liangping XIA, Chunlei DU, Hao SUN. Method of detecting microlens wavefront by Hartmann sensor[J]. Journal of Applied Optics, 2025, 46(2): 380
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Received: Feb. 1, 2024
Accepted: --
Published Online: May. 13, 2025
The Author Email: Chunyan WANG (王春艳)
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