Journal of Applied Optics, Volume. 46, Issue 2, 380(2025)

Method of detecting microlens wavefront by Hartmann sensor

Weibin YANG1, Chunyan WANG1、*, Weiguo ZHANG2, Jinyu WANG2, Liangping XIA3,4, Chunlei DU3,4, and Hao SUN1
Author Affiliations
  • 1School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • 2Research Center for Micro and Nano Manufacturing and System Integration, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 3Key Laboratory of Micro-Nano Optoelectronic Devices and Intelligent Sensing System, Yangtze Normal University, Chongqing 408100, China
  • 4Zhuhai Mai Time Electronics Technology Co.,Ltd., Zhuhai 519060, China
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    With the wide application of microlens, the rapid detection of optical properties of microlens is a key problem to be solved urgently by users and processors. Hartmann wavefront sensor was used to detect the wavefront of microlens and to quickly characterize its optical properties. In order to verify the feasibility of this method, the overall scheme of measuring microlens wavefront with Hartmann sensor was designed, the measurement experiment system was set up, and the measurement error source was analyzed. Combined with the experimental scheme, the centroid extraction algorithm and the Zernike polynomial wavefront reconstruction algorithm were studied to ensure the centroid extraction accuracy and wavefront reconstruction accuracy of the spot, and the effect of aperture diffraction of the lens to be tested on the wavefront detection accuracy was analyzed. The wavefront error and primary aberration information of a 200 μm convex lens were obtained, which provided a new idea for the rapid detection of optical properties of microlenses.

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    Weibin YANG, Chunyan WANG, Weiguo ZHANG, Jinyu WANG, Liangping XIA, Chunlei DU, Hao SUN. Method of detecting microlens wavefront by Hartmann sensor[J]. Journal of Applied Optics, 2025, 46(2): 380

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    Paper Information

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    Received: Feb. 1, 2024

    Accepted: --

    Published Online: May. 13, 2025

    The Author Email: Chunyan WANG (王春艳)

    DOI:10.5768/JAO202546.0203003

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