Chinese Journal of Lasers, Volume. 47, Issue 9, 904002(2020)

Nonlinear Error Compensation Method for PGC Demodulation Based on Kalman Filtering

Yan Liping, Zhou Chunyu, Xie Jiandong, Chen Benyong*, Lou Yingtian, and Yang Tao
Author Affiliations
  • Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China
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    References(19)

    [1] Yan L P, Chen Z Q, Chen B Y et al. Precision PGC demodulation for homodyne interferometer modulated with a combined sinusoidal and triangular signal[J]. Optics Express, 26, 4818-4831(2018).

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    [10] Zhang S H, Yan L P, Chen B Y et al. Real-time phase delay compensation of PGC demodulation in sinusoidal phase-modulation interferometer for nanometer displacement measurement[J]. Optics Express, 25, 472-485(2017).

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    Yan Liping, Zhou Chunyu, Xie Jiandong, Chen Benyong, Lou Yingtian, Yang Tao. Nonlinear Error Compensation Method for PGC Demodulation Based on Kalman Filtering[J]. Chinese Journal of Lasers, 2020, 47(9): 904002

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 13, 2020

    Accepted: --

    Published Online: Sep. 16, 2020

    The Author Email: Benyong Chen (chenby@zstu.edu.cn)

    DOI:10.3788/CJL202047.0904002

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