Chinese Journal of Lasers, Volume. 47, Issue 9, 904002(2020)

Nonlinear Error Compensation Method for PGC Demodulation Based on Kalman Filtering

Yan Liping, Zhou Chunyu, Xie Jiandong, Chen Benyong*, Lou Yingtian, and Yang Tao
Author Affiliations
  • Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China
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    Figures & Tables(8)
    Phase demodulation errors of PGC-Arctan algorithm in different situations. (a) Phase delay change; (b) modulation depth change
    Schematic of Kalman filter iteration process
    Kalman filter estimates convergence trend graph of orthogonal component parameters. (a) Alternating current amplitude; (b) direct current bias
    Sine phase modulation interferometer based on EOM. (a) Principle block diagram; (b) experimental device
    Phase demodulation error before and after compensation. (a) Before compensation; (b) after compensation
    Displacement measurement results before and after compensation at different frequencies. (a) 100 Hz; (b) 200 Hz
    Non-linear error analysis results. (a) Error results of displacement measurement; (b) FFT analysis result
    • Table 1. Simulation results of orthogonal component parameters

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      Table 1. Simulation results of orthogonal component parameters

      ProcessX(t)Y(t)X0(t)Y0(t)
      Set value0.900001.10000-0.03500-0.09000
      Kalman estimated value0.900011.10003-0.03496-0.09001
      Ellipse fitting value0.900021.10003-0.03504-0.09003
      Deviation of two methods-0.0000100.000080.00020
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    Yan Liping, Zhou Chunyu, Xie Jiandong, Chen Benyong, Lou Yingtian, Yang Tao. Nonlinear Error Compensation Method for PGC Demodulation Based on Kalman Filtering[J]. Chinese Journal of Lasers, 2020, 47(9): 904002

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 13, 2020

    Accepted: --

    Published Online: Sep. 16, 2020

    The Author Email: Benyong Chen (chenby@zstu.edu.cn)

    DOI:10.3788/CJL202047.0904002

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