Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 18(2023)
Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor
References(3)
[4] [4] JAMNEALA T,BRADLY P,SHIRAKAWA A,et al.An investigation of lateral modes in FBAR resonators［J］.IEEE Ultrasonics,Ferroelectrics and Frequency Control,2016,63(5):778-789.
[5] [5] SHIN J S,SONG I,LEE M C,et al.Bulk acoustic wave resonator with suppressed energy using improved lateral structure［J］.IEICE Electronics Express,2014,11(6):20130938.
[6] [6] PARK H,SONG I,LEE M C,et al.Novel bulk acoustic wave resonator structure for reducing electrical loss of electrodes［C］//Seattle:2013 IEEE MTT-S International Microwave Symposium,2013:1-4.
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ZHAO Lishuai, YI Xinyan, OUYANG Peidong, ZHANG Tielin, LIU Hongbin, LI Guoqiang. Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 18
Paper Information
Received: Jun. 7, 2022
Accepted: --
Published Online: Apr. 7, 2023
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