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Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 18(2023)

Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor

ZHAO Lishuai1, YI Xinyan1,2, OUYANG Peidong1, ZHANG Tielin1, LIU Hongbin1, and LI Guoqiang1,2
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    ZHAO Lishuai, YI Xinyan, OUYANG Peidong, ZHANG Tielin, LIU Hongbin, LI Guoqiang. Simulation and Preparation of Thin Film Bulk Acoustic Resonator with High Quality Factor[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 18

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    Paper Information

    Received: Jun. 7, 2022

    Accepted: --

    Published Online: Apr. 7, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.01.004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology