Acta Optica Sinica, Volume. 40, Issue 7, 0712002(2020)
Analysis of Image Quality Detection Performance of Scanning Hartmann Technology
Fig. 1. Principle of Shack-Hartmann sensor[4]. (a) Spots of flat wavefront; (b) spots of wavefront with aberration
Fig. 7. Recovery effect comparison of different order aberrations. (a) Recovery wavefront of the 8th-order aberration; (b) reference wavefront of the 8th-order aberration; (c) recovery wavefront of the 29th-order aberration; (d) reference wavefront of the 29th-order aberration
Fig. 8. Detection effect of low-order aberrations. (a) Reference aberration; (b) recovery aberration
Fig. 9. Detection results while adding high-order aberrations. (a) Recovery wavefront; (b) reference wavefront; (c) low-order residual; (d) high-order residual
Fig. 10. Three distribution types of sub-aperture. (a) Sparse sub-aperture distribution; (b) tangent sub-aperture distribution; (c) intensive sub-aperture distribution
Fig. 11. Recovery effect comparison of different sub-aperture distribution types. (a) Reference aberration introduced by the Zernike surface type; (b) recovery wavefront of sparse sub-aperture distribution; (c) recovery wavefront of tangent sub-aperture distribution; (d) recovery wavefront of intensive sub-aperture distribution
Fig. 12. Detection error curves under different sub-aperture numbers. (a) RMS relative error; (b) PV relative error
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Xunyi Dai, Yi Tan, Ge Ren, Zongliang Xie. Analysis of Image Quality Detection Performance of Scanning Hartmann Technology[J]. Acta Optica Sinica, 2020, 40(7): 0712002
Category: Instrumentation, Measurement and Metrology
Received: Jul. 30, 2019
Accepted: Dec. 9, 2019
Published Online: Apr. 15, 2020
The Author Email: Tan Yi (tandeman@126.com)