Acta Optica Sinica, Volume. 40, Issue 7, 0712002(2020)

Analysis of Image Quality Detection Performance of Scanning Hartmann Technology

Xunyi Dai1,2, Yi Tan1,2、*, Ge Ren1,2, and Zongliang Xie1,2
Author Affiliations
  • 1Key Laboratory of Beam Control, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(13)
    Principle of Shack-Hartmann sensor[4]. (a) Spots of flat wavefront; (b) spots of wavefront with aberration
    Diagram of testing process of single sub-aperture
    Mirror area covered by sub-apertures
    Structure of Cassegrain system
    Initial aberration of the system
    Variation of RMS relative error with the order of aberration
    Recovery effect comparison of different order aberrations. (a) Recovery wavefront of the 8th-order aberration; (b) reference wavefront of the 8th-order aberration; (c) recovery wavefront of the 29th-order aberration; (d) reference wavefront of the 29th-order aberration
    Detection effect of low-order aberrations. (a) Reference aberration; (b) recovery aberration
    Detection results while adding high-order aberrations. (a) Recovery wavefront; (b) reference wavefront; (c) low-order residual; (d) high-order residual
    Three distribution types of sub-aperture. (a) Sparse sub-aperture distribution; (b) tangent sub-aperture distribution; (c) intensive sub-aperture distribution
    Recovery effect comparison of different sub-aperture distribution types. (a) Reference aberration introduced by the Zernike surface type; (b) recovery wavefront of sparse sub-aperture distribution; (c) recovery wavefront of tangent sub-aperture distribution; (d) recovery wavefront of intensive sub-aperture distribution
    Detection error curves under different sub-aperture numbers. (a) RMS relative error; (b) PV relative error
    Fitting curve of detection error with the number of sub-apertures
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    Xunyi Dai, Yi Tan, Ge Ren, Zongliang Xie. Analysis of Image Quality Detection Performance of Scanning Hartmann Technology[J]. Acta Optica Sinica, 2020, 40(7): 0712002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 30, 2019

    Accepted: Dec. 9, 2019

    Published Online: Apr. 15, 2020

    The Author Email: Tan Yi (tandeman@126.com)

    DOI:10.3788/AOS202040.0712002

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