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Acta Optica Sinica, Volume. 40, Issue 7, 0712002(2020)

Analysis of Image Quality Detection Performance of Scanning Hartmann Technology

Xunyi Dai1,2, Yi Tan1,2、*, Ge Ren1,2, and Zongliang Xie1,2
Author Affiliations
  • 1Key Laboratory of Beam Control, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
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    Xunyi Dai, Yi Tan, Ge Ren, Zongliang Xie. Analysis of Image Quality Detection Performance of Scanning Hartmann Technology[J]. Acta Optica Sinica, 2020, 40(7): 0712002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 30, 2019

    Accepted: Dec. 9, 2019

    Published Online: Apr. 15, 2020

    The Author Email: Tan Yi (tandeman@126.com)

    DOI:10.3788/AOS202040.0712002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology