Fig. 1. (Color online) Schematic diagram of (a) horizontal HVPE and (b) vertical HVPE.

Fig. 2. (Color online) Optical photograph (unpublished) and SEM images of HVPE grown β-Ga₂O₃ at 850 °C.

Fig. 3. (Color online) The cross-section HRTEM of α- and ε-Ga₂O₃ on c-plane sapphire^[40].

Fig. 4. (Color online) Schematic Ga₂O₃ SBD structure with an HVPE-grown n-Ga₂O₃ drift layer.

Fig. 5. (Color online) Schematic structure, forward and reverse J–V characteristics of Ni/Au Ga₂O₃ SBD.