Acta Optica Sinica, Volume. 45, Issue 11, 1131001(2025)
Evolution of Mid-to-High Spatial Frequency Surface Morphology in PEALD-Deposited Al
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Libo Wang, Jingjing Xia, Siwen Lu, Xinshang Niu, Xiaochuan Ji, Hongfei Jiao, Jinlong Zhang, Zhanshan Wang, Zihua Xin. Evolution of Mid-to-High Spatial Frequency Surface Morphology in PEALD-Deposited Al
Category: Thin Films
Received: Feb. 16, 2025
Accepted: Apr. 3, 2025
Published Online: Jun. 23, 2025
The Author Email: Wang Zhanshan (wangzs@tongji.edu.cn), Xin Zihua (zhxin@shu.edu.cn)
CSTR:32393.14.AOS250600