Acta Optica Sinica, Volume. 45, Issue 11, 1131001(2025)

Evolution of Mid-to-High Spatial Frequency Surface Morphology in PEALD-Deposited AlO Thin Films

Libo Wang1... Jingjing Xia2, Siwen Lu2, Xinshang Niu2, Xiaochuan Ji2, Hongfei Jiao2, Jinlong Zhang2, Zhanshan Wang2,** and Zihua Xin1,* |Show fewer author(s)
Author Affiliations
  • 1College of Science, Shanghai University, Shanghai 200444, China
  • 2Institute of Precision Optical Engineering, School of Physical Science and Engineering, Tongji University, Shanghai 200092, China
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    References(42)

    [29] Yasaka M. X-ray thin-film measurement techniques. V. X-ray reflectivity measurement[J]. The Rigaku Journal, 26, 1-9(2010).

    [41] Tan M S, Ming S Q, Wu Y F et al. Preparation of X-ray Fresnel zone plate by atomic layer deposition and focused ion beam slicing[J]. Acta Optica Sinica, 43, 1134001(2023).

    [42] Lü W S, Wu H C, Li Y L et al. Preparation of X-ray multilayers based on atomic layer deposition[J]. Acta Optica Sinica, 44, 0431002(2024).

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    Libo Wang, Jingjing Xia, Siwen Lu, Xinshang Niu, Xiaochuan Ji, Hongfei Jiao, Jinlong Zhang, Zhanshan Wang, Zihua Xin. Evolution of Mid-to-High Spatial Frequency Surface Morphology in PEALD-Deposited AlO Thin Films[J]. Acta Optica Sinica, 2025, 45(11): 1131001

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    Paper Information

    Category: Thin Films

    Received: Feb. 16, 2025

    Accepted: Apr. 3, 2025

    Published Online: Jun. 23, 2025

    The Author Email: Wang Zhanshan (wangzs@tongji.edu.cn), Xin Zihua (zhxin@shu.edu.cn)

    DOI:10.3788/AOS250600

    CSTR:32393.14.AOS250600

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