Fig. 1. Schematic diagram of the ellipsograph fitting model

Fig. 2. Evolution of deposition rate, properties, and structure of thin films. (a) Fitting results of G, ΔG， and film thickness; (b) fitting results of film density, refractive index at 632 nm, and XRD results

Fig. 3. Surface characteristics of S-1 substrate. (a) AFM results; (b) PSD fitting results

Fig. 4. AFM results of thin films for different deposition cycles on S-1 substrate and the scanning range is 10 μm×10 μm

Fig. 5. AFM results of thin films for different deposition cycles on S-1 substrate and the scanning range is 1 μm×1 μm

Fig. 6. Surface morphology analysis results of thin films on S-1 for different deposition cycles. (a) Fitting results of PSD and ABC models; (b) RMS roughness and microstructure lateral correlation length of thin films

Fig. 7. AFM results of S-2 substrate for different scanning ranges

Fig. 8. AFM results of thin films with deposition cycles from 70 to 352 on S-1 substrate and the scanning range is 1 μm×1 μm

Fig. 9. Analysis results of surface morphology of thin films on S-2 substrate. (a) AFM surface morphology characterizations; (b) RMS roughness and microstructure lateral correlation length of thin films

Fig. 10. Comparison of optical properties and surface morphology evolution of thin films. (a) Refractive index at 632 nm; (b) evolution of PSD