Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers

Zhigang Zhao; Hongwen Xuan; Jingchong Wang; Zhenhua Cong; Xingyu Zhang; Yohei Kobayashi; Zhaojun Liu

doi:10.3788/AOS202242.1134010

Acta Optica Sinica, Volume. 42, Issue 11, 1134010(2022)

Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers

Zhigang Zhao^1,2, Hongwen Xuan^3、**, Jingchong Wang², Zhenhua Cong^1,2, Xingyu Zhang^1,2, Yohei Kobayashi⁴, and Zhaojun Liu^1,2、*

Author Affiliations

¹School of Information Science and Engineering, Shandong Provincial Key Laboratory of Laser Technology and Application, Shandong University, Qingdao 266237, Shandong, China

²Key Laboratory of Laser & Infrared System, Ministry of Education, Shandong University,Qingdao 266237, Shandong, China;

³GBA Branch of Aerospace Information Research Institute, Chinese Academy of Sciences, Guangzhou 510700, Guangdong, China

⁴The Institute for Solid State Physics, The University of Tokyo, Chiba 277- 8581, Japan

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Zhigang Zhao, Hongwen Xuan, Jingchong Wang, Zhenhua Cong, Xingyu Zhang, Yohei Kobayashi, Zhaojun Liu. Research Progresses on Vacuum-Ultraviolet 193-nm Band Solid-State Lasers[J]. Acta Optica Sinica, 2022, 42(11): 1134010

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Paper Information

Category: X-Ray Optics

Received: Feb. 9, 2022

Accepted: Apr. 7, 2022

Published Online: Jun. 3, 2022

The Author Email: Xuan Hongwen (xuanhw@aircas.ac.cn), Liu Zhaojun (zhaojunliu@sdu.edu.cn)

DOI:10.3788/AOS202242.1134010

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology