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Optics and Precision Engineering, Volume. 16, Issue 7, 1241(2008)

Application of laser scanning confocal microscope in micro-electro-mechanical system

ZENG Yi-bo1、*, JIANG Shu-sen1, HUANG Cai-hong2, ZHANG Yu-long1, and ZHANG Yan1
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    [1] [1] JORDANY H J,WEGNER M,TIZIANI H.Highly accurate non-contact characterization of engineering surfaces using confocal microscopy[J].Meas.Sci.Technol.,1999,9:1142-1151

    [3] [3] DIASPRO A,ANNUNZIATA S,RAIMONDO M,et al..A single-pinhole confocal laser scanning microscope for 3D imaging of bio-structures[J].IEEE Eng Med Biol.,1999,18:106-110

    [4] [4] BRAKENHOFF G J,BLOM P,BARENDS P.Confocal scanning light microscopy with high aperture immersion lenses[J].J Microsc.,1979,117:219-232

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    ZENG Yi-bo, JIANG Shu-sen, HUANG Cai-hong, ZHANG Yu-long, ZHANG Yan. Application of laser scanning confocal microscope in micro-electro-mechanical system[J]. Optics and Precision Engineering, 2008, 16(7): 1241

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    Paper Information

    Category:

    Received: Oct. 21, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: ZENG Yi-bo (zyb2005@xmu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology