Optics and Precision Engineering, Volume. 16, Issue 7, 1241(2008)
Application of laser scanning confocal microscope in micro-electro-mechanical system
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ZENG Yi-bo, JIANG Shu-sen, HUANG Cai-hong, ZHANG Yu-long, ZHANG Yan. Application of laser scanning confocal microscope in micro-electro-mechanical system[J]. Optics and Precision Engineering, 2008, 16(7): 1241
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Received: Oct. 21, 2007
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: ZENG Yi-bo (zyb2005@xmu.edu.cn)
CSTR:32186.14.
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