Chinese Optics, Volume. 15, Issue 1, 1(2022)

Research progress of lithium niobate thin-film modulators

Hai-feng LIU1, Hong-jie GUO1,2, Man-qing TAN1,2、*, and Zhi-yong LI1
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Opto-electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    Electro-optic modulators based on lithium niobate (LiNbO3, LN) thin-film platforms are advantageous for their small volume, high bandwidth and low half-wave voltage. They have important application prospects in the field of optical fiber communication and optical fiber sensing, and thus have became a heavily researched topic in recent years. In this paper, the research progress of the waveguide structures, coupling structures and electrode structures of LN thin-film modulators are reviewed in detail. The fabrication process of a LN thin-film waveguide is summarized, and the performances of different modulator structures are analyzed. Based on SOI and LNOI, a platform modulator is realized with VπL<2 V∙cm, a bilayer inversely tapered coupling scheme achieves a coupling loss <0.5 dB/facet , and a traveling wave electrode structure achieves a modulation bandwidth >100 GHz. Thin-film LN modulators are better than commercial LN modulators in most aspects. It can be predicted that in the near future, with the further improvement in waveguide technology, thin-film LN will become a popular scheme of LN modulators. Finally, the potential directions for the future of their research are proposed.

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    Hai-feng LIU, Hong-jie GUO, Man-qing TAN, Zhi-yong LI. Research progress of lithium niobate thin-film modulators[J]. Chinese Optics, 2022, 15(1): 1

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    Paper Information

    Category: Review

    Received: May. 24, 2021

    Accepted: --

    Published Online: Jul. 27, 2022

    The Author Email:

    DOI:10.37188/CO.2021-0115

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