Molding and Performance of Highly Dense Indium Tin Oxide Tubular Targets

WEN Lang; ZHAO Tianhao; XU Huarui; LONG Shenfeng; WU Fangzhou; XU Jiwen; ZHU Guisheng; HUANG Shicheng

doi:10.14062/j.issn.0454-5648.20250017

Journal of the Chinese Ceramic Society, Volume. 53, Issue 8, 2239(2025)

Molding and Performance of Highly Dense Indium Tin Oxide Tubular Targets

WEN Lang¹, ZHAO Tianhao¹, XU Huarui¹, LONG Shenfeng¹, WU Fangzhou¹, XU Jiwen¹, ZHU Guisheng^1、*, and HUANG Shicheng²

¹Guangxi Key Laboratory of Information Materials, Engineering Research Center of Electronic Information Materials and Devices, Ministry of Education, School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, Guangxi, China

²Guangxi Jinglian Photoelectric Material Co., Ltd, Liuzhou 545036, Guangxi, China

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WEN Lang, ZHAO Tianhao, XU Huarui, LONG Shenfeng, WU Fangzhou, XU Jiwen, ZHU Guisheng, HUANG Shicheng. Molding and Performance of Highly Dense Indium Tin Oxide Tubular Targets[J]. Journal of the Chinese Ceramic Society, 2025, 53(8): 2239

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Paper Information

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Received: Jan. 8, 2025

Accepted: Sep. 5, 2025

Published Online: Sep. 5, 2025

The Author Email: ZHU Guisheng (Zhuguisheng@guet.edu.cn)

DOI:10.14062/j.issn.0454-5648.20250017

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology