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Journal of Synthetic Crystals, Volume. 53, Issue 2, 181(2024)

Wet Oxidation of Semiconducting Silicon Carbide Wafers

LU Xuesong1,2, WANG Wantang1,2,3, WANG Rong1,2、*, YANG Deren1,2, and PI Xiaodong1,2
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    LU Xuesong, WANG Wantang, WANG Rong, YANG Deren, PI Xiaodong. Wet Oxidation of Semiconducting Silicon Carbide Wafers[J]. Journal of Synthetic Crystals, 2024, 53(2): 181

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    Paper Information

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    Received: Jun. 25, 2023

    Accepted: --

    Published Online: Jul. 30, 2024

    The Author Email: Rong WANG (rong_wang@zju.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology