Fig. 1. Two-dimensional structure of discharge area

Fig. 2. Simplification of simulation area and meshing

Fig. 3. Typical circuit of high repetition excimer laser power supply with solid state switch

Fig. 4. Simulation results of background flow field. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 5. Simulation results of shock waves at 0.5 μs. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 6. Distribution of density, pressure, and temperature in discharge area. (a) Distribution in X direction; (b) distribution in Y direction

Fig. 7. Simulation results of shock waves at 10 μs. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 8. Gas temperature distribution between electrodes at 10 μs

Fig. 9. Simulation results of shock waves at 40 μs. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 10. Simulation results of shock waves at 100 μs. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 11. Simulation results of shock waves at 300 μs. (a) Contours of density; (b) contours of velocity; (c) contours of temperature; (d) contours of pressure

Fig. 12. Observation image and simulation result of shock wave at 40 μs

Fig. 13. Pressure evolution diagram of transverse shock wave

Fig. 14. Reflection points of shock wave to be concerned at different frequencies

Fig. 15. Schematic of processing method of parts fitting. (a) Design to avoid; (b) suggested design

Fig. 16. Light intensity fluctuation curves at reference point

Fig. 17. Change curves of shock wave overpressure value

Fig. 18. Prediction of shock wave overpressure attenuation