Researching | Simulation of Discharge Shock Waves in Excimer Laser

Chinese Journal of Lasers, Volume. 47, Issue 9, 901001(2020)

Simulation of Discharge Shock Waves in Excimer Laser

Liu Bin^1,2,3, Ding Jinbin^1,3, Zhou Yi^1,3, Jiang Rui^1,3, and Wang Yu^1,2

Author Affiliations

¹Opto-Electronic Technology Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Beijing RSLaser Opto-Electronics Technology Co., Ltd, Beijing 100176, China

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Liu Bin, Ding Jinbin, Zhou Yi, Jiang Rui, Wang Yu. Simulation of Discharge Shock Waves in Excimer Laser[J]. Chinese Journal of Lasers, 2020, 47(9): 901001

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Paper Information

Category: laser devices and laser physics

Received: Mar. 2, 2020

Accepted: --

Published Online: Sep. 16, 2020

The Author Email:

DOI:10.3788/CJL202047.0901001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology