Fig. 1. Gratings fabricated by different methods using femtosecond lasers. (a) Large area nano grating structures fabricated by chemical etching assisted laser modification on silicon^[17]; (b) structural color of silicon surface processed by three different methods, the silicon surface processed by chemical etching assisted laser modification method displays a more vivid color^[17]; (c) regular grating structure machined on silicon-on-insulator (SOI) surface^[35]; (d) high-quality Dammann gratings processed by 3D printing and their diffraction patterns^[36]; (e) vortex grating processed on fiber end face by 3D printing method and its diffraction pattern^[37]

Fig. 2. Microlenses fabricated by different methods using femtosecond laser. (a) Microcolumn lens array with different directions prepared by anneal-assisted etching^[54]; (b) schematic of compound eye made by wet etching assisted modification and PDMS microconvex lens array gotten by the method^[60]; (c) imaging principle diagram, simulation diagram, picture, and actual imaging of three-layer microlens group manufactured by 3D printing^[48]；(d) microlens　machined with material inside refractive index modulation and its actual focusing light field^[70]

Fig. 3. Zone plates fabricated by different methods using femtosecond lasers. A single atom amplitude type zone plate fabricated by femtosecond laser^[74]: (a)(b) preparation schematic; (c)(e) optical microscopy image, Raman spectrum, and atomic force microscopy image of zone plate. Sapphire phase type zone plate processed by chemical etching assisted laser modification^[82]：(f)(g) scanning electron microscopy images; (h) distribution of focused light intensity; (i) imaging characteristics

Fig. 4. Several principles of temporal pulse shaping. (a) Structure of pulse train generator^[98]; (b) temporal pulse shaping system based on 4f system^[99]; (c) shaping pulse train by using Michelson interferometer^[99]; (d) shaping pulse train by using cascade Michelson interferometer^[100]; (e) shaping pulse train by birefringent crystal^[101]

Fig. 5. Improving chemical etching efficiency by temporal/spatial pulse shaping laser. (a) Microlens array processed by etching assisted temporal double pulse shaping^[113]; (b)(d) optical path chart, optical microscopy images, and profile of microlens etched by double-pulse with different delay values^[114]

Fig. 6. Gratings processed by different methods. (a) Grating processed by electrons dynamics controlled temporally shaped pulse and grating diffraction patterns^[115]; (b) grating induced by cylindrical mirror shaping laser on a two-dimensional material surface^[119]; (c) regular grating processed by non-ablative method of a cylindrical mirror^[120]; (d) phase shifted Bragg grating processed in optical fiber and its refractive index change^[121]

Fig. 7. Fabrication of different metasurfaces by dynamic shaping techniques. (a) Fabrication of terahertz hypersurface by femtosecond laser slit shaping^[127]; (b) circular polarization multiplexing terahertz holographic hypersurface^[127]; (c) using SLM interference shaping light field^[136]; (d) fabrication of terahertz hypersurface by SLM interference shaping light field and its terahertz transmission spectrum^[136]