Failure Analysis and Early Screening of High Power Substrate-Transferred VCSEL Arrays

Quancai Zhou; Yang Li; Chongxian Yuan; Xinye Fan; Chuanchuan Li; Xin Wei

doi:10.3788/CJL231556

Chinese Journal of Lasers, Volume. 51, Issue 13, 1301006(2024)

Failure Analysis and Early Screening of High Power Substrate-Transferred VCSEL Arrays

Quancai Zhou^1,2, Yang Li^2,3, Chongxian Yuan^2,4, Xinye Fan¹, Chuanchuan Li^2,3、*, and Xin Wei^2,3

Author Affiliations

¹School of Physical Science and Information Engineering, Liaocheng University, Liaocheng 252059, Shandong , China

²Nano-Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

³College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

⁴School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Quancai Zhou, Yang Li, Chongxian Yuan, Xinye Fan, Chuanchuan Li, Xin Wei. Failure Analysis and Early Screening of High Power Substrate-Transferred VCSEL Arrays[J]. Chinese Journal of Lasers, 2024, 51(13): 1301006

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Paper Information

Category: laser devices and laser physics

Received: Dec. 20, 2023

Accepted: Mar. 13, 2024

Published Online: Jul. 4, 2024

The Author Email: Chuanchuan Li (lichuan@semi.ac.cn)

DOI:10.3788/CJL231556

CSTR:32183.14.CJL231556

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology