Acta Photonica Sinica, Volume. 53, Issue 5, 0553110(2024)
High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology
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Wenhao LI, Pinggang JIA, Jun WANG, Bo XUE, Shun WAN, Kaiyao HOU, Jijun XIONG. High Sensitivity Micro Fiber Fabry Perot Pressure Sensor Based on Silicon MEMS Technology[J]. Acta Photonica Sinica, 2024, 53(5): 0553110
Category: Special Issue for Microcavity Photonics
Received: Jan. 20, 2024
Accepted: Mar. 18, 2024
Published Online: Jun. 20, 2024
The Author Email: Jijun XIONG (xiongjijun@nuc.edu.cn)