Fig. 1. Schematic of sensor structure

Fig. 2. Numerical simulation of the relationship between sensitive membrane thickness and sensor pressure range and sensitivity

Fig. 3. Process flow diagram of pressure sensor production

Fig. 4. Sensor head and fiber optic integration

Fig. 5. Fiber optic Fabry Perot demodulation system based on Fiso

Fig. 6. Schematic diagram of sensor air pressure performance testing

Fig. 7. Sensor pressure test results

Fig. 8. Results of pressure sensing experiments at different temperatures