Simulation of Non-Destructive Measurement of Geometric Parameters of Multi-Structure Thin Films Using a Single-Port Surface Acoustic Wave Resonator

LIU Zhuo; XIAO Xia; ZHANG Jinsong; ZHANG Li

doi:10.11977/j.issn.1004-2474.2025.03.009

Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 465(2025)

Simulation of Non-Destructive Measurement of Geometric Parameters of Multi-Structure Thin Films Using a Single-Port Surface Acoustic Wave Resonator

LIU Zhuo, XIAO Xia, ZHANG Jinsong, and ZHANG Li

Author Affiliations

State Key Laboratory of Advanced Materials for Intelligent Sensing，Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology，School of Microelectronics，Tianjin University，Tianjin 300072，China

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LIU Zhuo, XIAO Xia, ZHANG Jinsong, ZHANG Li. Simulation of Non-Destructive Measurement of Geometric Parameters of Multi-Structure Thin Films Using a Single-Port Surface Acoustic Wave Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 465

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Received: Feb. 10, 2025

Accepted: --

Published Online: Jul. 11, 2025

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DOI:10.11977/j.issn.1004-2474.2025.03.009

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology