System Design for Dark‑Field Detection of Nanoparticles on Wafer Metal Surface

Quan Deng; Zeyu Zhao; He Lin; Ling Liu; Xiachuqin Li; Gensen Yang; Xiangang Luo

doi:10.3788/CJL230444

Chinese Journal of Lasers, Volume. 50, Issue 22, 2204003(2023)

System Design for Dark‑Field Detection of Nanoparticles on Wafer Metal Surface

Quan Deng^1,2, Zeyu Zhao^1,2, He Lin^1,3, Ling Liu^1,2, Xiachuqin Li¹, Gensen Yang^1,2, and Xiangang Luo^1,2、*

¹State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China

²School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

³School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, China

show less

Abstract Get PDF(in Chinese)

Cited By

Article index updated: Mar. 10, 2025

The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Quan Deng, Zeyu Zhao, He Lin, Ling Liu, Xiachuqin Li, Gensen Yang, Xiangang Luo. System Design for Dark‑Field Detection of Nanoparticles on Wafer Metal Surface[J]. Chinese Journal of Lasers, 2023, 50(22): 2204003

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Measurement and metrology

Received: Jan. 9, 2023

Accepted: Mar. 15, 2023

Published Online: Nov. 7, 2023

The Author Email: Luo Xiangang (lxg@ioe.ac.cn)

DOI:10.3788/CJL230444

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology