Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712006(2024)
Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics
[13] de Lega X C, Dresel T, Liesener J et al. Optical form and relational metrology of aspheric micro optics[J]. American Society for Precision Engineering, 20-23(2017).
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Jun Yang, Yijun Shen, Jiayu Liu, Rongxian Wen, Mingjun Ren, Rong Su. Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712006
Category: Instrumentation, Measurement and Metrology
Received: Dec. 22, 2023
Accepted: Feb. 5, 2024
Published Online: Sep. 9, 2024
The Author Email: Yijun Shen (sjtu_syj@sjtu.edu.cn), Mingjun Ren (renmj@sjtu.edu.cn), Rong Su (surong@siom.ac.cn)
CSTR:32186.14.LOP232717