Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712006(2024)

Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics

Jun Yang1,2, Yijun Shen1、***, Jiayu Liu1,2, Rongxian Wen2, Mingjun Ren1、*, and Rong Su2、**
Author Affiliations
  • 1School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    References(18)

    [13] de Lega X C, Dresel T, Liesener J et al. Optical form and relational metrology of aspheric micro optics[J]. American Society for Precision Engineering, 20-23(2017).

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    Jun Yang, Yijun Shen, Jiayu Liu, Rongxian Wen, Mingjun Ren, Rong Su. Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 22, 2023

    Accepted: Feb. 5, 2024

    Published Online: Sep. 9, 2024

    The Author Email: Yijun Shen (sjtu_syj@sjtu.edu.cn), Mingjun Ren (renmj@sjtu.edu.cn), Rong Su (surong@siom.ac.cn)

    DOI:10.3788/LOP232717

    CSTR:32186.14.LOP232717

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