Fig. 1. The NA cone limit when CSI probe measures high curvature optics

Fig. 2. Schematic of the overall composition of the five-axis white light interferometric system

Fig. 3. Schematics of coherence scanning interferometry. (a) Schematic of the optical path of the self-developed CSI probe; (b) schematic of PZT longitudinal scanning and camera acquisition during measurement

Fig. 4. Coordinate system establishment diagram of the five-axis white light interferometric system

Fig. 5. Kinematic chain topology of the five-axis white light interferometric system

Fig. 6. Physical drawing of five-axis white-light interferometric system

Fig. 7. Experimental sample. (a) Aspherical calibration part with a diameter of 310 mm; (b) auxiliary alignment spherical sample with a diameter of 13 mm and residual annular knife pattern under a single field of view centered on the crown point of the ball

Fig. 8. The five key coordinate values of the calibration point

Fig. 9. Four-point calibration Schematic of an aspheric calibration part with known surface equations

Fig. 10. Eight verification points for calibration accuracy verification experiments

Fig. 11. Error diagram of the calibration accuracy verification experimental results