Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712006(2024)

Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics

Jun Yang1,2, Yijun Shen1、***, Jiayu Liu1,2, Rongxian Wen2, Mingjun Ren1、*, and Rong Su2、**
Author Affiliations
  • 1School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    A five-axis white-light interference-measurement system is constructed by integrating a self-developed coherence scanning interferometric probe into a Moore five-axis motion platform for the surface-morphology measurement of curved optical components. To achieve automated measurement, the kinematic model of the system is investigated and the inverse kinematic equations are solved. A calibration method using high-precision aspherical calibration components with known expressions is proposed for unknown parameters in the inverse kinematics equations. Finally, an experiment to verify the calibration accuracy of the proposed system is conducted, and the results show that after automatic focusing and leveling, the error between the actual and theoretical focal coordinates remains less than ±3 μm. The measurement requirements of the probe is satisfied, and the proposed system can automatically measure the surface morphology of curved optical components.

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    Jun Yang, Yijun Shen, Jiayu Liu, Rongxian Wen, Mingjun Ren, Rong Su. Calibration of Structural Parameters of Five-Axis Surface Topography Measurement System for Curved Optics[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 22, 2023

    Accepted: Feb. 5, 2024

    Published Online: Sep. 9, 2024

    The Author Email: Yijun Shen (sjtu_syj@sjtu.edu.cn), Mingjun Ren (renmj@sjtu.edu.cn), Rong Su (surong@siom.ac.cn)

    DOI:10.3788/LOP232717

    CSTR:32186.14.LOP232717

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