Acta Optica Sinica, Volume. 29, Issue 7, 1877(2009)

Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry

Xue Hui*, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, and Zhang Yueguang
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    Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 7, 2008

    Accepted: --

    Published Online: Jul. 20, 2009

    The Author Email: Xue Hui (adongszju@hotmail.com)

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