Acta Optica Sinica, Volume. 29, Issue 7, 1877(2009)
Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry
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Xue Hui, Shen Weidong, Gu Peifu, Luo Zhenyue, Liu Xu, Zhang Yueguang. Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry[J]. Acta Optica Sinica, 2009, 29(7): 1877
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