Chinese Journal of Lasers, Volume. 50, Issue 2, 0204002(2023)
High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources
Fig. 3. Absolute errors of solution results of second-order error compensation algorithm and correction algorithm
Fig. 4. Absolute errors of solution results of improved algorithm and second-order error compensation algorithm
Fig. 5. Hardware principle block diagram of signal synchronous acquisition and processing of four quadrant detector
Fig. 6. Hardware physical diagramof multi-channel synchronous acquisition circuit of high repetition frequency narrow pulse signal
Fig. 8. Comparison of absolute error of spot position detection between second-order error compensation algorithm and second-order extended error compensation algorithm
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Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002
Category: Measurement and metrology
Received: Mar. 21, 2022
Accepted: Jun. 22, 2022
Published Online: Dec. 5, 2022
The Author Email: Yu Deyang (yudeyang830@163.com)