Chinese Journal of Lasers, Volume. 50, Issue 2, 0204002(2023)

High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources

Xinpeng Li1,2, Deyang Yu1、*, Jin Guo1, Fei Chen1, and Qikun Pan1
Author Affiliations
  • 1State Key Laboratory of Laser Interaction with Matter,Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,Jilin, China
  • 2University of Chinese Academy of Sciences,Beijing 100049, China
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    Figures & Tables(8)
    Structural diagram of spot position detection system
    Detection principle of four quadrant detector
    Absolute errors of solution results of second-order error compensation algorithm and correction algorithm
    Absolute errors of solution results of improved algorithm and second-order error compensation algorithm
    Hardware principle block diagram of signal synchronous acquisition and processing of four quadrant detector
    Hardware physical diagramof multi-channel synchronous acquisition circuit of high repetition frequency narrow pulse signal
    Physical diagram of test platform
    Comparison of absolute error of spot position detection between second-order error compensation algorithm and second-order extended error compensation algorithm
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    Xinpeng Li, Deyang Yu, Jin Guo, Fei Chen, Qikun Pan. High-Precision Spot Detection of Driving Laser for Extreme Ultraviolet Lithography Light Sources[J]. Chinese Journal of Lasers, 2023, 50(2): 0204002

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    Paper Information

    Category: Measurement and metrology

    Received: Mar. 21, 2022

    Accepted: Jun. 22, 2022

    Published Online: Dec. 5, 2022

    The Author Email: Yu Deyang (yudeyang830@163.com)

    DOI:10.3788/CJL220686

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